OptoSigma

TAF-ES-DM-40
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A focus laser with large spot and a separate laser detector are aligned at a large angle outside of the objective lens. Focus is maintained by minimizing the error signal generated by the sensor.

[Characteristics]
◦As the optical system being focused and the auto focus optical system are independent, the auto focus system will operate with various magnification objective lenses.
◦Focus point can be offset to support focusing through transparent surfaces such as glass and film.
◦The small, compact design makes it easy to integrate into inspection equipment systems.

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TAF-ES-DM-40

Part Number
Objective Lens Camera Travel Travel Trace Range (Tracking capable range) Reproducibility (Focus) Response frequency* Illumination optical systems Weight (head part) Focus Actuator
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TAF-ES-DM-40

2× − 50×
(Outer diameter φ32mm WD11mm Objective lens)

C mount CCD camera (Size is less than 2/3″)

Off-axis (out of Lens) reflection active system by semiconductor laser (equivalent to class 3R, light output 4.5mW or less, wavelength at 670nm)

10mm

Regular reflector: ±3mm
Transparent body: contact us separately
Reference) thickness 0.7mm, glass ±0.3mm

±0.5μm

About 5Hz (regular reflector step ±10μm)

Coaxial epi-illumination (aperture stop built in)

2.2kg

Stepping motor drive stage

RoHS  

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