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VTAMM
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CE-compliant compact motorized stages for use in high vacuum.
It is a motorized stage suitable for experiments in a vacuum environment and for use in a vacuum chamber.
Compact, slim body for minimal footprint. VTAMM can also be installed in small vacuum equipment.

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Technical Data
Documents/Downloads
Guide

▶Includes 1m teflon coated cables to connect the vacuum motor and vacuum limit switches to the chamber feedthrough connector.
▶Various types of bases and holderswhich can be used in vacuum environments are also available.

Common Specifications

■Motor / Sensor Specifications

Motor / Motor TypeVacuum compatible 5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor / Motor Part NumberA7715-90215KV (□28mm)
Motor / Motor Step Angle0.72°
Sensor / Control OutputTouch sensor
Sensor / Output LogicNORMAL CLOSE

■Compatible Driver / Controller

Compatible DriverSG-5M、MC-S0514ZU、SG-514MSC、MC-7514PCL
Compatible ControllerGSC-01、GSC-02、SHOT-702、GIP-101、HSC-103、SHOT-302GS、SHOT-304GS、HIT-M・HIT-S、PGC-04-U
Outline Drawing
■VTAMM60S-20X

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■VTAMM60S-20XY

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■VTAMM60S-20Z

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Wiring of Vacuum Stages

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The vacuum compatible stepping motor A7715-90215KV used for vacuum stages has five bare lead wires. For wiring, they correspond to the motor lead colors shown in the wiring diagrams of driver or cable as follows. (The motor leads shown in the connection diagrams of driver or cable indicate wiring of stepping motors used for normal stages.)

Part Number

Catalog PDF

dxf

STP

IGS

SAT

VTAMM60S-20X

VTAMM60S-20XY

VTAMM60S-20Z

Spec
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    PRICE(USD) Stock Qty
VTAMM60S-20XNEW
VTAMM60S-20XYNEW
VTAMM60S-20ZNEW

20mm

60×60mm

Precision ground screw φ4mm、0.5mm lead

Crossed roller

Aluminium

None

0.6kg

1μm/pulse

0.5μm/pulse

5mm/sec

6μm

29.4N(3.0kgf)

5μm

GN-PT5M3B-1 (Metrol Co., Ltd.)

Vacuum touch sensor (NORMAL CLOSE)

None

None

20mm

60×60mm

Precision ground screw φ4mm、0.5mm lead

Crossed roller

Aluminium

None

1.2kg

1μm/pulse

0.5μm/pulse

5mm/sec

6μm

19.6N(2.0kgf)

5μm

GN-PT5M3B-1 (Metrol Co., Ltd.)

Vacuum touch sensor (NORMAL CLOSE)

None

None

20mm

60×60mm

Precision ground screw φ4mm、0.5mm lead

Crossed roller

Aluminium

None

0.65kg

1μm/pulse

0.5μm/pulse

6μm

14.7N(1.5kgf)

5μm

GN-PT5M3B-1 (Metrol Co., Ltd.)

Vacuum touch sensor (NORMAL CLOSE)

None

None

RoHS CE

$4,800.00

CONTACT
US
RoHS CE

$9,600.00

CONTACT
US
RoHS CE

$5,000.00

CONTACT
US