For the maskless processing, it can do direct drawing processing on the basis of the data like CAD.
It is usually classified as scan optical system and focusing optical system.
(There is also a hybrid scanning that combines both).
|กก||Scan optical system||Focusing optical system|
|Scanning method||Galvano scan||Stage scan|
|Focusing method||fθLens||Objective Lens|
|Focusing spot diameter||few 10μ - few 100μ||submicron - few 10μ|
|Death of focus||deep||shallow|