SIGMAKOKI

Register


FS-UPX
Travel
Stage Size
Zoom

FS-UPX is feedback stage with 1nm resolution positioning.
FS-UPX series operates faster than high torque type FS-SPX series.
In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution is achieved by feedback control using position information of encoder.
There are two types of the stage which travel of 20mm and 50mm.

Related product
Products
Technical Data
Documents/Downloads
Common Specifications
Primary MaterialAluminum
FinishBlack anodized

■Motor / Sensor Specifications

Motor Type□28mm 5 phase stepping motor
Limit SensorEquipped
Origin SensorNone
Proximity Origin SensorNone

■Equipped Scale

Signal Cycle2μm
Scale Cable*2m *Scale cable comes directly out of the stage. Please prepare "extension cable for scale" separately if 2m or longer cable are needed.

■Compatible Driver / Cable

Compatible ControllerFC-911
Compatible CablePM-CA-*
Outline Drawing
■FS-1020UPX

Zoom
■FS-1050UPX

Zoom

Part Number

Catalog PDF

dxf

STP

IGS

SAT

FS-1020UPX

FS-1050UPX

Spec
Compare
Part Number
Add to cart Cart
    JP Yen Stock Qty
FS-1020UPXNEW
FS-1050UPXNEW

20mm

60×60mm

0.7㎏

1nm

±2nm

49N(5kgf)

10μm

5mm/sec

50mm

120×120mm

1.6㎏

1nm

±2nm

98N(10kgf)

10μm

5mm/sec

   

¥700,000

CONTACT
US
   

¥800,000

CONTACT
US