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FS-X
Travel
Stage Size
Positioning Slide
Feed Screw
Driving Motor
Minimum Resolution *1 FC-414
Positional Repeatability *1 FC-411
Positional Repeatability *1 FC-414
Load Capacity
Zoom

FS-X is feedback stage with sub-micron resolution positioning..
In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution is achieved by feedback control using position information of encoder.
There are seven types of the stages. It is ideal for collecting the data in a wide range or for performing precise positioning and movement of a sample on a single stage by the large travel range.

Related product
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Technical Data
Documents/Downloads
Common Specifications
Primary MaterialAluminum
FinishBlack anodized

■Motor / Sensor Specifications

Motor TypeEquipped
Limit SensorEquipped: FS-3200X, FS-3300X, FS-3400X
None: FS-1020X, FS-1050X, FS-1100X, FS-3150X
Origin SensorNone
Proximity Origin SensorNone

■Equipped Scale

Signal Cycle4μm
Scale Cable*2m *Scale cable comes directly out of the stage. Please prepare "extension cable for scale" separately if 2m or longer cable are needed.

■Compatible Driver / Cable

Compatible ControllerFC-411: FS-1020X, FS-1050X, FS-1100X, FS-3150X
FC-414: FS-3200X, FS-3300X, FS-3400X
Compatible CablePM-CA: FS-1020X, FS-1050X, FS-1100X, FS-3150X
PM4N-CA*SD: FS-3200X, FS-3300X, FS-3400X
Outline Drawing
■FS-1020X

Zoom
■FS-1050X

Zoom
■FS-1100X

Zoom
■FS-3150X

Zoom
■FS-3200X

Zoom
■FS-3300X

Zoom
■FS-3400X

Zoom

Part Number

Catalog PDF

dxf

STP

IGS

SAT

FS-1020X

FS-1050X

FS-1100X

FS-3150X

FS-3200X

FS-3300X

FS-3400X

Spec
Compare
Part Number
Add to cart Cart
    JP Yen Stock Qty
FS-1020XNEW
FS-1050XNEW
FS-1100XNEW
FS-3150XNEW
FS-3200XNEW
FS-3300XNEW
FS-3400XNEW

20mm

60×60mm

Crossed roller

Ball screw diameter φ4mm, 1mm lead

□28mm 5 phase stepping motor

0.5㎏

50nm

-

±100nm

-

49N(5kgf)

10μm

50mm

120×120mm

Crossed roller

Ball screw diameter φ6mm, 1mm lead

□28mm 5 phase stepping motor

1.6㎏

50nm

-

±100nm

-

98N(10kgf)

10μm

100mm

120×120mm

LM Guide

Ball screw diameter φ6mm, 1mm lead

□28mm 5 phase stepping motor

2.1㎏

50nm

-

±100nm

-

98N(10kgf)

10μm

150mm

120×170mm

LM Guide

Ball screw diameter φ8mm, 1mm lead

□28mm 5 phase stepping motor

2.8㎏

50nm

-

±100nm

-

98N(10kgf)

10μm

200mm

160×230mm

LM Guide

Ball screw diameter φ10mm, 2mm lead

□28mm 5 phase stepping motor

5㎏

-

50nm

-

±100nm

196N(20kgf)

10μm

300mm

160×160mm

LM Guide

Ball screw diameter φ14mm, 5mm lead

□42mm 5 phase stepping motor

8.5㎏

-

50nm

-

±100nm

196N(20kgf)

10μm

400mm

160×160mm

LM Guide

Ball screw diameter φ14mm, 5mm lead

□42mm 5 phase stepping motor

9.5㎏

-

50nm

-

±100nm

196N(20kgf)

10μm

   

¥320,000

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¥400,000

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¥485,000

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¥680,000

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¥700,000

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¥750,000

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US
   

¥850,000

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US