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VSGSP-60
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Load Capacity
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Compact motorized stages for use in high vacuum.
Compact, slim body for minimal footprint.

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Technical Data
Documents/Downloads
Guide

▶Includes 1m teflon coated cables to connect the vacuum motor and vacuum limit switches to the chamber feedthrough connector.
▶Please Contact our Sales Division for more information about vacuum applications miniature motorized stages which are CE certificated.

Common Specifications

■Motor / Sensor Specifications

Motor / Motor TypeVacuum compatible 5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor / Motor Part NumberTS3664N5(□24mm)
Motor / Motor Step Angle0.72°
Sensor / Power VoltageContact type
Sensor / Current ConsumptionNORMAL OPEN

■Compatible Driver / Controller

Compatible DriverSG-5M, MC-S0514ZU, SG-514MSC, MC-7514PCL
Compatible ControllerSHOT-302GS, SHOT-304GS
Outline Drawing
■VSGSP-60(X)

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■VSGSP-60(XY)

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■VSGSP-60(Z)

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Vacuum Limit Switch

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Wiring of Vacuum Stages

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The vacuum compatible stepping motor TS3664N5 used for vacuum stages has five bare lead wires.,
For wiring, they correspond to the motor lead colors shown in the wiring diagrams of driver or cable as follows.
(The motor leads shown in the connection diagrams of driver or cable indicate wiring of stepping motors used for normal stages.)

Part Number

Catalog PDF

dxf

STP

IGS

SAT

VSGSP-60(X)

VSGSP-60(XY)

VSGSP-60(Z)

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VSGSP-60(X)生産中止
VSGSP-60(XY)生産中止
VSGSP-60(Z)生産中止

20mm

55×60mm

Precision ground screw φ4mm, 0.5mm lead

Crossed roller

Aluminium

None

0.55kg

1μm/pulse

0.5μm/pulse

5mm/sec

6μm

29.4N(3.0kgf)

5μm

Vacuum limit switch

Contact type

None

None

20mm

55×60mm

Precision ground screw φ4mm, 0.5mm lead

Crossed roller

Aluminium

None

1.1kg

1μm/pulse

0.5μm/pulse

5mm/sec

6μm

19.6N(2.0kgf)

5μm

Vacuum limit switch

Contact type

None

None

20mm

55×60mm

Precision ground screw φ4mm, 0.5mm lead

Crossed roller

Aluminium

None

0.6kg

1μm/pulse

0.5μm/pulse

-

6μm

14.7N(1.5kgf)

5μm

Vacuum limit switch

Contact type

None

None

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