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VSGSP-YAW
Rotation Range
Stage Size
Positioning Slide
Stage Material
Load Capacity
Censer type
Limit Sensor
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Motorized SGSP-YAW rotation stages modified for use in high vacuum.

◦The φ60mm size is best suited for use in smaller chambers.
◦The φ120mm size has a high load capacity due the larger bearing and larger motor.

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Technical Data
Documents/Downloads
Guide

▶Includes 1m teflon coated cables to connect the vacuum motor and vacuum limit switches to the chamber feedthrough connector.

Common Specifications

■Motor / Sensor Specifications

Motor / Motor TypeVSGSP-60YAW:Vacuum compatible 5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
VSGSP-120YAW:Vacuum compatible 5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor / Motor Part NumberVSGSP-60YAW:TS3664N5(□24mm)
VSGSP-120YAW:PK543V-NB(□42mm)
Motor / Motor Step Angle0.72°
Sensor / Control OutputVSGSP-60YAW:-
VSGSP-120YAW:Contact type
Sensor / Output LogicVSGSP-60YAW:-
VSGSP-120YAW:NORMAL OPEN

■Compatible Driver / Controller

Compatible DriverSG-5M, MC-Z0514ZU, SG-514MSC, MC-7514PCL
Compatible ControllerGSC-01, GSC-02, SHOT-702, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04-U, HSC-103
Outline Drawing
■VSGSP-120YAW

Zoom
■VSGSP-60YAW

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Wiring of Vacuum Stages

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The vacuum compatible stepping motor TS3664N5 used for vacuum stages has five bare lead wires.,
For wiring, they correspond to the motor lead colors shown in the wiring diagrams of driver or cable as follows.
(The motor leads shown in the connection diagrams of driver or cable indicate wiring of stepping motors used for normal stages.)

Part Number

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STP

IGS

SAT

VSGSP-60YAW

VSGSP-120YAW

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VSGSP-60YAW
VSGSP-120YAW

In the CW or CCW direction to ∞

φ60mm

Worm and worm wheel

Bearing method

Aluminium

None

0.45kg

0.005°/pulse

0.0025°/pulse

0.5mdeg

20°/sec

0.02°

29.4N(3.0kgf)

0.05°

None

None

None

None

Counterclockwise CCW direction to ∞, Clockwise CW direction stops at near 0 degree (−2.5°)

φ120mm

Worm and worm wheel

Crossed roller

Aluminium・Stainless steel

None

1.7kg

0.005°/pulse

0.0025°/pulse

0.5mdeg

20°/sec

0.02°

98N(10.0kgf)

0.05°

GN-STM35A-1 (Metrol Co., Ltd.)

Vacuum touch sensor (NORMAL OPEN)

None

None

RoHS CE

¥480,000

CONTACT
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RoHS CE

¥520,000

CONTACT
US