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VPDM-ACT
Tip Shape
Travel
Minimum travel
Thrust Force
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A small, high-resolution actuator that can be operated remotely in the equipment of a high vacuum chamber .

◦Two types of mounting shank diameters, a standard type of 9.5 mm diameter and a small type of 6 mm diameter, are available.
◦A flat actuator tip type (VPDM-**ACT) and a spherical actuator tip type (VPDM-**ACTR) are available.

Related product
Products
Technical Data
Documents/Downloads
Guide

▶The piezo drive controller (PDM-ID-02) is required to operate the motor.
▶There is a lead wire coming out of the actuator, which can be connected to the terminal of the chamber or the lead wire can be pulled out. The piezo drive actuator comes with a controller-specific connection cable (1m) to connect to this lead wire.

Attention

▶This product is driven by inertia using piezoelectric elements, so there is no precision in positioning, etc. In addition, the speed and minimum travel may vary depending on individual differences and the direction of the actuator's feed.
▶If you wish to combine with your own manual stage, please contact us for a separate consultation. .
▶If you purchase the stage and angled micrometer heads together, we assemble them and deliver to you. Please contact sales in advance. Depending on the specifications of the combination, additional work or modifications may be required. Please contact our sales.

Outline Drawing
■VPDM-6.5ACT

Zoom
■VPDM-13ACT

Zoom
■VPDM-6.5ACTR

Zoom
■VPDM-13ACTR

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Outgassing Measurement Data

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Part Number

Catalog PDF

dxf

STP

IGS

SAT

VPDM-13ACT

VPDM-13ACTR

VPDM-6.5ACT

VPDM-6.5ACTR

Spec
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Part Number
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    JP Yen Stock Qty
VPDM-13ACTNEW
VPDM-13ACTRNEW
VPDM-6.5ACTNEW
VPDM-6.5ACTRNEW

Flat type

>13nm (Max. 18nm)

<20nm

29.4N

1.5mm/min

0.05kg

R type

>13nm (Max. 18nm)

<20nm

29.4N

1.5mm/min

0.05kg

Flat type

>6.5nm (Max. 13nm)

<30nm

13N

1.5mm/min

0.02kg

R type

>6.5nm (Max. 13nm)

<30nm

13N

1.5mm/min

0.02kg

RoHS CE

¥100,000

CONTACT
US
RoHS CE

¥100,000

CONTACT
US
RoHS CE

¥100,000

CONTACT
US
RoHS CE

¥100,000

CONTACT
US