Application System
Laser Processing
Scan Optical System and Focusing Optical System

For the maskless processing, it can do direct drawing processing on the basis of the data like CAD.
It is usually classified as scan optical system and focusing optical system.
(There is also a hybrid scanning that combines both).

กก Scan optical system Focusing optical system
Scanning method Galvano scan Stage scan
Scanning speed high low
Scanning area narrow wide
Focusing method fθLens Objective Lens
Focusing spot diameter few 10μ - few 100μ submicron - few 10μ
Death of focus deep shallow
Scan Type

Focusing System (with Observation System)